Open AccessDeposition of carbon layers from cyclohexane by thermal Chemical Vapor Deposition
Author(s) -
Bharath Thiruvengadachari
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.2704
Subject(s) - materials science , chemical vapor deposition , silicon , argon , chemical engineering , oxide , carbon fibers , scanning electron microscope , sputter deposition , cyclohexane , silicon oxide , catalysis , thin film , analytical chemistry (journal) , nanotechnology , sputtering , composite material , metallurgy , chemistry , organic chemistry , silicon nitride , composite number , engineering