Open AccessDeposition of carbon layers from cyclohexane by thermal Chemical Vapor Deposition
Author(s) -
Bharath Thiruvengadachari
Publication year - 2005
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.2704
Subject(s) - materials science , chemical vapor deposition , silicon , argon , chemical engineering , oxide , scanning electron microscope , carbon fibers , cyclohexane , sputter deposition , catalysis , thin film , nanotechnology , sputtering , composite material , metallurgy , chemistry , organic chemistry , composite number , engineering
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