Open AccessFoldable substrates for micro-ultrasonic transducers
Author(s) -
Karthik Balasubramanian
Publication year - 2022
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.1459
Subject(s) - capacitive micromachined ultrasonic transducers , transducer , ultrasonic sensor , materials science , wafer , capacitive sensing , piezoelectricity , fabrication , acoustics , ultrasound , substrate (aquarium) , intravascular ultrasound , optoelectronics , biomedical engineering , electrical engineering , engineering , radiology , composite material , medicine , oceanography , physics , alternative medicine , pathology , geology