Open AccessFoldable substrates for micro-ultrasonic transducers
Author(s) -
Karthik Balasubramanian
Publication year - 2011
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.1459
Subject(s) - capacitive micromachined ultrasonic transducers , ultrasonic sensor , transducer , materials science , wafer , capacitive sensing , piezoelectricity , fabrication , acoustics , ultrasound , substrate (aquarium) , intravascular ultrasound , ultrasonic testing , optoelectronics , biomedical engineering , electrical engineering , engineering , radiology , composite material , medicine , oceanography , physics , alternative medicine , pathology , geology
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