Open AccessA Study of the Effect of Energetic Flux Bombardment on Intensified Plasma-Assisted Processing.
Author(s) -
Albert A. Adjaottor
Publication year - 1997
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_disstheses.6554
Subject(s) - sputtering , nitriding , diffusion , plasma , atomic physics , materials science , ion , yield (engineering) , vacancy defect , particle (ecology) , chemistry , layer (electronics) , metallurgy , nuclear physics , thin film , nanotechnology , thermodynamics , physics , crystallography , oceanography , organic chemistry , geology
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