Open AccessSynthesis of UV/X-ray Sensitive Polymers and Their Applications as Resists.
Author(s) -
Jack D. Davies
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_disstheses.6152
Subject(s) - ethylenediamine , tetraphenylborate , polymer chemistry , chemistry , cobalt , diamine , materials science , inorganic chemistry , organic chemistry , ion