Open AccessLow-Temperature Oxidation of Silicon Using Point-To-Plane Corona Discharge.
Author(s) -
Mohammad Madani
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_disstheses.5074
Subject(s) - thermal oxidation , oxide , analytical chemistry (journal) , materials science , silicon , atmospheric temperature range , leakage (economics) , optoelectronics , chemistry , metallurgy , physics , chromatography , meteorology , economics , macroeconomics