Open AccessDesign and fabrication of electromagnetic micro-relays using the UV-LIGA technique
Author(s) -
John D. Williams
Publication year - 2004
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.970
Subject(s) - liga , materials science , lithography , fabrication , aspect ratio (aeronautics) , photoresist , optoelectronics , mechanical engineering , optics , nanotechnology , engineering , layer (electronics) , medicine , alternative medicine , pathology , physics
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