Open AccessDesign and fabrication of electromagnetic micro-relays using the UV-LIGA technique
Author(s) -
John D. Williams
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.970
Subject(s) - liga , materials science , lithography , fabrication , photoresist , aspect ratio (aeronautics) , optoelectronics , mechanical engineering , nanotechnology , engineering , layer (electronics) , medicine , alternative medicine , pathology