Open AccessLaterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications
Author(s) -
In-Hyouk Song,
Tinghui Xin,
Pratul K. Ajmera
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.702
Subject(s) - microactuator , materials science , photoresist , cmos , fabrication , liga , optoelectronics , gate oxide , microsystem , transistor , electrical engineering , resist , integrated circuit , nanotechnology , voltage , engineering , layer (electronics) , actuator , medicine , alternative medicine , pathology