Open AccessLaterally Movable Gate Field Effect Transistor (LMGFET) for microsensor and microactuator applications
Author(s) -
InHyouk Song
Publication year - 2005
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.702
Subject(s) - microactuator , materials science , photoresist , cmos , liga , fabrication , microsystem , optoelectronics , gate oxide , electrical engineering , transistor , resist , electroplating , integrated circuit , nanotechnology , voltage , engineering , layer (electronics) , actuator , medicine , alternative medicine , pathology
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