Developing defect-tolerant demolding process in nanoimprint lithography
Author(s) -
Alborz Amirsadeghi
Publication year - 2013
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.3376
Subject(s) - resist , materials science , composite material , curing (chemistry) , nanoimprint lithography , shrinkage , photoresist , layer (electronics) , fabrication , medicine , alternative medicine , pathology
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