Open AccessPolymer based microfabrication and its applications in optical MEMS and bioMEMS
Author(s) -
Guocheng Shao
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.2925
Subject(s) - microlens , microfabrication , fabrication , materials science , microelectromechanical systems , soft lithography , photolithography , microfluidics , polydimethylsiloxane , lithography , nanotechnology , microchannel , lab on a chip , lens (geology) , optoelectronics , optics , medicine , physics , alternative medicine , pathology