Open AccessThree-dimensional micromachined on-chip inductors for high frequency applications
Author(s) -
Nimit Chomnawang
Publication year - 2022
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.2572
Subject(s) - inductor , materials science , electrical engineering , solenoid , optoelectronics , electrical conductor , substrate (aquarium) , photoresist , parasitic capacitance , engineering , capacitance , electrode , nanotechnology , physics , voltage , oceanography , layer (electronics) , quantum mechanics , geology