Open AccessFabrication of high aspect ratio vibrating cylinder microgyroscope structures by use of the LIGA process
Author(s) -
Yohannes M. Desta
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.1564
Subject(s) - liga , materials science , electroplating , microelectromechanical systems , surface micromachining , fabrication , mechanical engineering , silicon nitride , gyroscope , layer (electronics) , optoelectronics , silicon , nanotechnology , engineering , aerospace engineering , pathology , medicine , alternative medicine