Open AccessDeposition and Characterization of Ceramic Thin Films and a New Experimental Approach to Evaluate the Mechanical Integrity of Film/Substrate Interfacial Layers
Author(s) -
Yang Mu
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.1427
Subject(s) - materials science , nanoindentation , thin film , ceramic , focused ion beam , composite material , scanning electron microscope , physical vapor deposition , x ray photoelectron spectroscopy , substrate (aquarium) , nanotechnology , chemical engineering , ion , oceanography , physics , quantum mechanics , geology , engineering