Open AccessQuantum optical improvements in metrology, sensing, and lithography
Author(s) -
Sean D. Huver
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_dissertations.1058
Subject(s) - quantum sensor , quantum metrology , photonics , quantum , quantum optics , physics , metrology , low emissivity , lithography , quantum technology , optoelectronics , computer science , emissivity , optics , engineering physics , open quantum system , quantum mechanics