Open AccessThe effects of hydrogen content on reactively sputtered amorphous silicon films
Author(s) -
F. R. Jeffrey
Publication year - 2018
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31274/rtd-180816-5550
Subject(s) - silicon , amorphous silicon , amorphous solid , materials science , hydrogen , content (measure theory) , chemical engineering , metallurgy , chemistry , crystallography , crystalline silicon , engineering , mathematics , organic chemistry , mathematical analysis