Open AccessApplication of optical microscopy for the qualitative and quantitative analysis of the solid surface
Author(s) -
A. A. Dedkova,
M. A. Makhiboroda
Publication year - 2020
Publication title -
nanostruktury. matematičeskaâ fizika i modelirovanie
Language(s) - English
Resource type - Journals
ISSN - 2224-8412
DOI - 10.31145/2224-8412-2020-20--2-41-64
Subject(s) - microelectronics , microscopy , optical microscope , surface (topology) , materials science , qualitative analysis , optics , quantitative analysis (chemistry) , nanotechnology , chemistry , physics , scanning electron microscope , mathematics , geometry , qualitative research , social science , sociology , chromatography
The possibilities of optical microscopy for preliminary and complex analysis of structures, which are used mainly in microelectronics and micromechanics, are demonstrated. Specific examples of the use of optical microscopy for qualitative and quantitative analysis, development of technological processes, control of defects, analysis of surface relief, determination of the parameters of structures are given. Surface measurements are performed in reflected and transmitted light, using bright and dark field modes.