Open AccessInvestigation of High-Precision Laser Instrument for Fabrication of Integrated Circuits and Monitoring of Seismic and Gravitational Processes
Author(s) -
Yu.B. Minin,
Dmitry Alexandrov,
M. N. Dubrov,
M. V. Fedorov
Publication year - 2021
Publication title -
problemy razrabotki perspektivnyh mikro- i nanoèlektronnyh sistem ...
Language(s) - English
Resource type - Journals
ISSN - 2078-7707
DOI - 10.31114/2078-7707-2021-4-182-186
Subject(s) - fabrication , laser , integrated circuit , electronic circuit , computer science , engineering , materials science , physics , optics , electrical engineering , medicine , alternative medicine , pathology