Open AccessCharacterization of Micro- and Mesoporous films with the Aid of Adsorption Ellipsometric Porosimetry Method
Author(s) -
Dmitry A. Vorotyntsev,
Alexey S. Vishnevskiy
Publication year - 2021
Publication title -
problemy razrabotki perspektivnyh mikro- i nanoèlektronnyh sistem ...
Language(s) - English
Resource type - Journals
ISSN - 2078-7707
DOI - 10.31114/2078-7707-2021-4-140-147
Subject(s) - porosimetry , mesoporous material , characterization (materials science) , materials science , adsorption , chemical engineering , nanotechnology , chemistry , porosity , composite material , porous medium , engineering , organic chemistry , catalysis