Open AccessPossibilities of metrological systems of atomic force microscopy for research, development and control of parameters of micro and nanoelectronic products
Author(s) -
В. А. Быков,
Alexander Bykov,
Yu. A. Bobrov,
В. В. Котов,
S.I. Leesment,
Vyatcheslav Polyakov
Publication year - 2020
Publication title -
problemy razrabotki perspektivnyh mikro- i nanoèlektronnyh sistem ...
Language(s) - English
Resource type - Journals
ISSN - 2078-7707
DOI - 10.31114/2078-7707-2020-4-187-192
Subject(s) - metrology , atomic force microscopy , nanotechnology , materials science , physics , optics