Open AccessSpeeding up the evaluation of polygons mutual placement task for double pattern technology
Author(s) -
D.A. Bulakh,
A.V. Korshunov
Publication year - 2020
Publication title -
problemy razrabotki perspektivnyh mikro- i nanoèlektronnyh sistem ...
Language(s) - English
Resource type - Journals
ISSN - 2078-7707
DOI - 10.31114/2078-7707-2020-3-41-48
Subject(s) - task (project management) , computer science , engineering , systems engineering