Open AccessHigh capacitance ratio radio-frequency micromechanical switch
Author(s) -
Alexey V. Tkachenko,
Igor Lysenko
Publication year - 2020
Publication title -
problemy razrabotki perspektivnyh mikro- i nanoèlektronnyh sistem ...
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2078-7707
DOI - 10.31114/2078-7707-2020-3-237-243
Subject(s) - capacitance , radio frequency , materials science , radio spectrum , electrical engineering , optoelectronics , telecommunications , physics , computer science , engineering , electrode , quantum mechanics