Open AccessIon-beam formation and track modification of InAs nanoclusters in silicon and silica
Author(s) -
Ф. Ф. Комаров,
O. V. Milchanin,
В.А. Скуратов,
M. Makhavikou,
A. Janse van Vuuren,
JH Neethling,
E. Wendler,
Л. А. Власукова,
И. Н. Пархоменко,
V. N. Yuvchenko
Publication year - 2016
Publication title -
bulletin of the russian academy of sciences physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.226
H-Index - 20
eISSN - 1934-9432
pISSN - 1062-8738
DOI - 10.3103/s106287381602012x
Subject(s) - nanoclusters , silicon , materials science , ion , ion beam , track (disk drive) , nanotechnology , focused ion beam , optoelectronics , beam (structure) , engineering physics , ion track , optics , chemistry , engineering , physics , mechanical engineering , organic chemistry
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