Open AccessHumidity Sensing Properties of CCTO Thin Films Grown by Radio Frequency Magnetron Sputtering:Substrates Dependent
Author(s) -
Mohsen Ahmadipour,
Mohd Fadzi lAIN,
Zainal Arifin Ahmad
Publication year - 2018
Publication title -
international journal of current research in science, engineering and technology
Language(s) - English
Resource type - Journals
ISSN - 2581-4311
DOI - 10.30967/ijcrset.1.s1.2018.245-250
Subject(s) - materials science , humidity , thin film , radio frequency , sputter deposition , optoelectronics , sputtering , composite material , computer science , nanotechnology , physics , meteorology , telecommunications