Open AccessSTUDY OF ION IMPLANTATION INTO GAN SUBTRATE AND THIN FILM BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION TECHNIQUE (MOCVD)
Author(s) -
Waseem Ullah Shah,
Mohammad Shoaib Khan,
Zarin Ullah,
Shahzeb Burki,
Dil Faraz Khan
Publication year - 2020
Publication title -
international journal of technical research and science
Language(s) - English
Resource type - Journals
ISSN - 2454-2024
DOI - 10.30780/ijtrs.v05.i03.003
Subject(s) - metalorganic vapour phase epitaxy , chemical vapor deposition , materials science , combustion chemical vapor deposition , thin film , metal , ion plating , deposition (geology) , optoelectronics , chemical engineering , nanotechnology , carbon film , layer (electronics) , metallurgy , epitaxy , engineering , paleontology , sediment , biology