Open AccessEffect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films
Author(s) -
Abdelaziz Abboudi,
Linda Aissani,
Abdenour Saoudi,
Hamid Djebaili
Publication year - 2022
Publication title -
metallurgical and materials engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.161
H-Index - 2
eISSN - 2812-9105
pISSN - 2217-8961
DOI - 10.30544/823
Subject(s) - materials science , nanoindentation , thin film , residual stress , nitride , scanning electron microscope , composite material , molybdenum , silicon nitride , fourier transform infrared spectroscopy , layer (electronics) , metallurgy , optics , nanotechnology , physics