Open AccessModelling and measurement of polishing tool influence functions for edge control
Author(s) -
Hongyu Li,
Guoyu Yu,
David Walker,
R. L. Evans
Publication year - 2011
Publication title -
journal of the european optical society rapid publications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.357
H-Index - 33
ISSN - 1990-2573
DOI - 10.2971/jeos..11048
Subject(s) - polishing , enhanced data rates for gsm evolution , profilometer , telescope , computer science , numerical control , astronomical interferometer , optics , fabrication , mechanical engineering , engineering drawing , physics , surface finish , interferometry , engineering , telecommunications , medicine , alternative medicine , pathology , machining
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