Open AccessModelling and measurement of polishing tool influence functions for edge control
Author(s) -
Hongyu Li,
Guoyu Yu,
David H. Walker,
Robert Evans
Publication year - 2011
Publication title -
journal of the european optical society. rapid publications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.357
H-Index - 33
ISSN - 1990-2573
DOI - 10.2971/jeos..11048
Subject(s) - polishing , enhanced data rates for gsm evolution , profilometer , numerical control , computer science , telescope , fabrication , engineering drawing , mechanical engineering , optics , engineering , surface finish , physics , artificial intelligence , medicine , alternative medicine , pathology , machining