Open AccessNew Approach for Monitoring a Direct Laser Interference Patterning Process Using a Combination of an Infrared Camera and a Diffraction Measurement System
Author(s) -
Nikolai Schröder,
Sascha Teutoburg-Weiss,
G. Vergara,
Andrés Fabián Lasagni
Publication year - 2021
Publication title -
journal of laser micro nanoengineering
Language(s) - English
Resource type - Journals
ISSN - 1880-0688
DOI - 10.2961/jlmn.2021.02.2009
Subject(s) - materials science , interference (communication) , diffraction , infrared , optics , laser , process (computing) , optoelectronics , computer science , physics , telecommunications , channel (broadcasting) , operating system