Open AccessEvaluation of Laser Drilling of Ni Film on Silicon for Solid Oxide Fuel Cells
Author(s) -
Mindaugas Maciulevičius
Publication year - 2011
Publication title -
journal of laser micro nanoengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 26
ISSN - 1880-0688
DOI - 10.2961/jlmn.2011.03.0005
Subject(s) - materials science , silicon , oxide , silicon oxide , fuel cells , laser , drilling , chemical engineering , nanotechnology , optoelectronics , metallurgy , optics , engineering , silicon nitride , physics