Open AccessSilicon Nanowire Technologies: brief review, home-made solutions and future trends
Author(s) -
Lucas Stucchi-Zucchi,
Marcos V. Puydinger dos Santos,
Fernando César Rufino,
J. A. Diniz
Publication year - 2022
Publication title -
journal of integrated circuits and systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.125
H-Index - 11
eISSN - 1872-0234
pISSN - 1807-1953
DOI - 10.29292/jics.v17i2.614
Subject(s) - nanowire , materials science , nanotechnology , lithography , etching (microfabrication) , footprint , silicon , stacking , very large scale integration , silicon nanowires , fabrication , engineering physics , optoelectronics , electronic engineering , engineering , physics , medicine , paleontology , alternative medicine , layer (electronics) , nuclear magnetic resonance , pathology , biology
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