Open AccessINTEGRATED OPTICAL WAVEGUIDES BASED ON Si3N4 FILMS
Author(s) -
Ivan Kulinich,
Alina Somogonyants,
E. V. Shesterikov,
Denis Mokhovikov
Publication year - 2022
Publication title -
infokommunikacionnye i radioèlektronnye tehnologii
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2587-9936
DOI - 10.29039/2587-9936.2022.05.3.23
Subject(s) - waveguide , materials science , etching (microfabrication) , surface roughness , integrated optics , deposition (geology) , surface finish , optoelectronics , optics , nanotechnology , layer (electronics) , composite material , physics , geology , paleontology , sediment