Open AccessCONCEPT OF A WORKFLOW MANAGEMENT SYSTEM APPLICATION FOR PHOTOMASK DESIGN
Author(s) -
Konstantin Medvedev,
Alexandr Pankratov,
В. К. Иванов
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1660.silicon-2020/391-394
Subject(s) - photomask , workflow , workflow management system , computer science , workflow engine , workflow technology , software engineering , metamodeling , systems engineering , database , engineering , layer (electronics) , resist , chemistry , organic chemistry