Open AccessMODELING OF THE SELF-ORGANIZATION PROCESS OF DSA-LITHOGRAPHY USING CELLULAR AUTOMATA
Author(s) -
Mikhail Litavrin,
Е. С. Горнев,
I. V. Matyushkin
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1658.silicon-2020/386-389
Subject(s) - cellular automaton , process (computing) , computer science , lithography , automaton , theoretical computer science , algorithm , programming language , materials science , optoelectronics