Open AccessRESEARCH OF APPLICATIONS OF MACHINE LEARNING ALGORITHMS IN IMPROVING OPC SOLUTIONS
Author(s) -
Pavel Tryasoguzov,
Georgiy Teplov,
A. V. Kuzovkov
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1647.silicon-2020/350-354
Subject(s) - gradient boosting , computer science , boosting (machine learning) , convolutional neural network , machine learning , algorithm , random forest , artificial neural network , displacement (psychology) , artificial intelligence , feedforward neural network , psychology , psychotherapist