Open AccessBEOL IMPACT TO IC PERFORMANCE FOR SOI180, SOI90 AND CMOS180, CMOS90 TECHNOLOGIES
Author(s) -
Dmirty Shipitsin,
Alexandr Potupchik,
Alexey Nushtaev
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1615.silicon-2020/251-254
Subject(s) - electronic engineering , integrated circuit , reliability engineering , engineering , electrical engineering , materials science , computer science