Open AccessIMPACT OF MECHANICAL STRESS ON PHASE FORMATION IN HAFNIA
Author(s) -
Viacheslav Konstantinov,
A. G. Italyantsev
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1613.silicon-2020/242-247
Subject(s) - hafnia , tetragonal crystal system , materials science , stress (linguistics) , phase (matter) , ultimate tensile strength , compressive strength , ab initio , helmholtz free energy , composite material , condensed matter physics , crystallography , thermodynamics , chemistry , physics , cubic zirconia , ceramic , linguistics , philosophy , organic chemistry