Open AccessMODELING THE TOPOLOGICAL NON-UNIFORMITY OF THE LAYERS DEPOSITED FROM THE GAS PHASE ON A SUBSTRATE MICRORELIEF
Author(s) -
В. И. Евдокимов
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1606.silicon-2020/221-223
Subject(s) - substrate (aquarium) , gas phase , materials science , topology (electrical circuits) , phase (matter) , optoelectronics , chemistry , electrical engineering , engineering , ecology , biology , organic chemistry