Open AccessDEPENDENCE OF ELASTIC STRESSES ON THE THICKNESS OF THE DEPOSITED MATERIAL FOR GERMANIUM GROWTH ON SILICON
Author(s) -
А. П. Коханенко,
Vladimir V. Dirko,
Kiril Lozovoy
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1594.silicon-2020/183-185
Subject(s) - germanium , silicon , materials science , substrate (aquarium) , diffraction , work (physics) , silicon germanium , composite material , optoelectronics , condensed matter physics , optics , geology , thermodynamics , physics , oceanography