Open AccessIMPROVEMENT OF SELF-ALIGNED DOUBLE PATTERNING USING SPIN-ON-CARBON MATERIAL
Author(s) -
Елена Тихонова,
Е. С. Горнев
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1592.silicon-2020/176-179
Subject(s) - photolithography , superposition principle , materials science , extreme ultraviolet , carbon fibers , optoelectronics , plasma , ultraviolet , layer (electronics) , nanotechnology , optics , physics , composite number , composite material , laser , quantum mechanics