Open AccessLASER PLASMA-CHEMICAL FRAGMENTATION OF PLATES INTO CRYSTALS
Author(s) -
S. V. Redkin,
P. P. Maltsev,
S. A. Gamkrelidze
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1585.silicon-2020/152-158
Subject(s) - laser , sapphire , plasma , materials science , fragmentation (computing) , wavelength , ultraviolet , optoelectronics , diamond , optics , x ray laser , copper , laser power scaling , physics , quantum mechanics , computer science , metallurgy , operating system , composite material