Open AccessELECTRON SPECTROSCOPIC CONTROL OF SURFACE CLEANING OF SILICON SUBTRATES
Author(s) -
Utkir Bahodirovich Sharopov
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1568.silicon-2020/97-100
Subject(s) - silicon , materials science , electron , optoelectronics , physics , nuclear physics