Open AccessSYNTHESIS AND CONDUCTING PROPERTIES OF SILICONCARBON NANOSTRUCTURES OBTAINED BY THE METHOD HIGH-TEMPERATURE PLASMA-CHEMICAL SYNTHESIS
Author(s) -
А. С. Мазинов,
A. S. Tyutyunik,
В.С. Гурченко
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1565.silicon-2020/87-91
Subject(s) - silicon , nanocrystalline material , materials science , nanocrystalline silicon , carbon fibers , plasma , nanostructure , chemical engineering , conductivity , electrical resistivity and conductivity , nanotechnology , fullerene , crystalline silicon , composite material , optoelectronics , chemistry , organic chemistry , composite number , physics , electrical engineering , quantum mechanics , amorphous silicon , engineering