Open AccessFEATURES OF FORMATION AND FUNCTIONAL CHARACTERISTICS OF MULTILAYER SYSTEMS BASED ON POROUS SILICON
Author(s) -
A. S. Lenshin,
Fgbou Vo,
Konstantin A. Barkov,
Natalya G. Skopintseva,
D. V. Minakov,
П. В. Середин,
Voronezh
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - English
Resource type - Conference proceedings
DOI - 10.29003/m1558.silicon-2020/68-70
Subject(s) - silicon , porous silicon , materials science , porosity , porous medium , phase (matter) , chemical composition , chemical engineering , work (physics) , spectroscopy , optoelectronics , composite material , chemistry , thermodynamics , organic chemistry , physics , quantum mechanics , engineering