Open AccessCUBIC SILICON CARBIDE ON SILICON
Author(s) -
S. V. Redkin,
Moscow Iuhfse Ras,
П. А. Мальцев,
S. A. Gamkrelidze
Publication year - 2020
Publication title -
international forum “microelectronics – 2020”. joung scientists scholarship “microelectronics – 2020”. xiii international conference «silicon – 2020». xii young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.29003/m1557.silicon-2020/62-68
Subject(s) - silicon carbide , silicon , materials science , carbide , microwave , displacement (psychology) , optoelectronics , metallurgy , computer science , psychology , telecommunications , psychotherapist