Open AccessТонкие плёнки ScxTi1-xOy: АСО-синтез, состав, механизм роста
Author(s) -
Д. Е. Петухова
Publication year - 2021
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.26902/lar_11
Subject(s) - computer science
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