Open AccessSensitivity enhancement and comparison of MEMS/NEMS cantilevers
Author(s) -
Anuj Kumar Goel
Publication year - 2019
Publication title -
journal of mechanics of continua and mathematical sciences
Language(s) - English
Resource type - Journals
eISSN - 2454-7190
pISSN - 0973-8975
DOI - 10.26782/jmcms.2019.02.00029
Subject(s) - nanoelectromechanical systems , microelectromechanical systems , sensitivity (control systems) , cantilever , materials science , nanotechnology , optoelectronics , engineering , electronic engineering , composite material , nanomedicine , nanoparticle