Open AccessELLIPSOMETRIC CONTROL OF PARAMETERS OF MULTILAYER Fe/Si NANOSTRUCTURES DURING GROWTH
Author(s) -
И. А. Тарасов,
I. A. Yakovlev,
С. Н. Варнаков,
С. М. Жарков,
S. G. Ovchinnikov
Publication year - 2018
Publication title -
kosmičeskie apparaty i tehnologii
Language(s) - English
Resource type - Journals
ISSN - 2618-7957
DOI - 10.26732/2618-7957-2018-4-220-224
Subject(s) - nanostructure , materials science , ellipsometry , control (management) , nanotechnology , optoelectronics , chemical engineering , thin film , computer science , engineering , artificial intelligence