Open AccessThickness of the surface layer of porous silicon
Author(s) -
V.М. Yurov
Publication year - 2020
Publication title -
vestnik. seriâ fizičeskaâ/habaršysy - a̋l-farabi atyndaġy k̦azak̦ memlekettik u̇lttyk̦ universitetì. fizika seriâsy
Language(s) - English
Resource type - Journals
eISSN - 2663-2276
pISSN - 1563-0315
DOI - 10.26577/rcrh.2020.v72.i1.07
Subject(s) - silicon , porous silicon , materials science , wafer , etching (microfabrication) , layer (electronics) , nanocrystalline silicon , nanostructure , isotropic etching , nanotechnology , monocrystalline silicon , crystalline silicon , optoelectronics , amorphous silicon