Open AccessStudy of the composition of titanium oxide films deposited by reactive magnetron sputtering
Author(s) -
Danagul Aubakirova,
N. Yerdybaeva,
В. Ф. Пичугин
Publication year - 2020
Publication title -
vestnik. seriâ fizičeskaâ/habaršysy - a̋l-farabi atyndaġy k̦azak̦ memlekettik u̇lttyk̦ universitetì. fizika seriâsy
Language(s) - English
Resource type - Journals
eISSN - 2663-2276
pISSN - 1563-0315
DOI - 10.26577/rcph.2020.v74.i3.06
Subject(s) - raman spectroscopy , materials science , analytical chemistry (journal) , x ray photoelectron spectroscopy , anatase , titanium , sputter deposition , elastic recoil detection , rutile , thin film , titanium oxide , sputtering , nitride , chemistry , chemical engineering , photocatalysis , optics , nanotechnology , layer (electronics) , metallurgy , biochemistry , physics , organic chemistry , chromatography , engineering , catalysis