Open AccessPorous Material Interactions with RF plasma
Author(s) -
Г. Паскалов,
Roger M. Jarvis,
L. Adjarova,
E. Benova,
B. Harmison
Publication year - 2020
Publication title -
recent contributions to physics
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2663-2276
pISSN - 1563-0315
DOI - 10.26577/rcph.2020.v74.i3.05
Subject(s) - chemical physics , plasma , materials science , kinetic energy , substrate (aquarium) , sputtering , evaporation , atomic physics , chemistry , thin film , nanotechnology , thermodynamics , physics , oceanography , quantum mechanics , geology
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