Open AccessInfluence of Cu impurities and surface temperature to the formation of thin a-C:H(Me) film
Author(s) -
Živilė Rutkūnienė
Publication year - 2019
Publication title -
physical sciences and technology
Language(s) - English
Resource type - Journals
eISSN - 2522-1361
pISSN - 2409-6121
DOI - 10.26577/phst-2019-2-p9
Subject(s) - silicon , materials science , amorphous carbon , amorphous solid , analytical chemistry (journal) , substrate (aquarium) , amorphous silicon , carbon fibers , thin film , carbon film , nanoclusters , impurity , raman spectroscopy , ellipsometry , crystallography , crystalline silicon , nanotechnology , chemistry , metallurgy , composite material , composite number , organic chemistry , oceanography , physics , optics , geology