Open AccessCorrelating Deposition Parameters with Structure and Properties of Nanoscale Multilayer (TiSi)N/CrN Coatings
Author(s) -
В. М. Береснев,
O. V. Maksakova,
S. V. Lytovchenko,
Sergiy Klymenko,
D. V. Horokh,
А. S. Manokhin,
B. O. Mazilin,
Volodymyr Chyshkala,
V. А. Stolbovoy
Publication year - 2022
Publication title -
east european journal of physics
Language(s) - English
Resource type - Journals
eISSN - 2312-4539
pISSN - 2312-4334
DOI - 10.26565/2312-4334-2022-2-14
Subject(s) - materials science , tribology , indentation , composite material , cathode , substrate (aquarium) , biasing , deposition (geology) , analytical chemistry (journal) , metallurgy , voltage , chemistry , electrical engineering , paleontology , oceanography , engineering , chromatography , sediment , biology , geology